Precise numerical simulation of electrostatically driven actuators with application to MEMS loudspeakers
نویسندگان
چکیده
A recently developed Finite-Element (FE) model for the precise computation of electrostatic driven MEMS (Micro-ElectroMechanical-Systems) is presented. Thereby, we fully take geometric nonlinearity, contact in the snap-in mode, nonlinear electrostatic coupling forces as well as the moving of charged thin membrane-plate structures (electrodes) in an electric field into account. Furthermore, since we concentrate on MEMS loudspeaker applications, we can also compute the radiated sound. In addition to this, an optimization method towards sound pressure level increase is presented, namely the buckling back plate method. In this method stress induced self raising is applied to increase the volume flow of the speaker.
منابع مشابه
MEMS arrays for deformable mirrors
A new class of silicon-based deformable mirror for use in optical applications such as adaptive optical systems and optical correlators is being built. The mirror will be a massively parallel system of electrostatically-controlled, interconnected microactuators that can be coordinated to achieve precise actuation and control at a macroscopic level. The deformable mirror system described here wi...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کاملTransverse and longitudinal dynamic modeling of bimorph piezoelectric actuators with investigating the effect of vibrational modes
Bimorph piezoelectric cantilevered (BPC) actuators have recently received a great deal of attention in a variety of micro-electromechanical systems (MEMS) applications. Dynamic modeling of such actuators needs to be improved in order to enhance the control performance. Previous works have usually taken transv...
متن کاملThe reproduction of the response of an aircraft panel to turbulent boundary layer excitations in laboratory conditions
One important topic in the aeronautic and aerospace industries is the reproduction of random pressure field, with prescribed spatial correlation characteristics, in laboratory conditions. In particular, the random-wall pressure fluctuations induced by a Turbulent Boundary Layer (TBL) excitation are a major concern for cabin noise problem, as this excitation has been identified as the dominant c...
متن کامل